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機械学習を用いたTiNエピタキシャル成長のclosed-loop optimization
(Closed-loop optimization of TiN epitaxial thin-film growth utilizing machine learning )
第41回電⼦材料研究討論会. November 04, 2021-November 05, 2021.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2021-11-11 03:38:38 +0900 Updated at: 2021-11-11 03:38:38 +0900