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機械学習を用いたTiNエピタキシャル成長のclosed-loop optimization
(Closed-loop optimization of TiN epitaxial thin-film growth utilizing machine learning )

Author(s)大久保 勇男, ホー ズーフォン, Jiyeon N. Lee, 相澤 俊, Mikk Lippmaa, 知京 豊裕, 津田 宏治, 森 孝雄.
Event name第41回電⼦材料研究討論会
Year of publication2021
LanguageJapanese

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