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ZrO2/Al2O3/ZrO2多層を用いたDRAMキャパシタにおけるAl2O3層が電気特性に及ぼす効果
(Effect of Al2O3 interlayer on electrical characteristic for DRAM capacitors with ZrO2/Al2O3/ZrO2 multilayer)
シリコン材料・デバイス研究会. 2016-06-29.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:09:39 +0900Updated at: 2017-07-10 22:23:48 +0900