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Improvement of electrical properties of Al2O3 capacitors on (001) and (010) planes of β-Ga2O3 using dummy-SiO2 process
European Materials Research Society (E-MRS) 2026 Fall Meeting. September 14, 2026-September 17, 2026.
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Created at: 2026-10-08 03:09:44 +0900 Updated at: 2026-10-08 03:09:44 +0900