Deposition and mechanism study for super-high dielectric constant AlOx/TiOy nanolaminates
6th International Conference on MATERIALS SCIENCE & NANOTECHNOLOGY. 2023. 招待講演
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2023-09-15 03:20:38 +0900更新時刻: 2024-01-09 03:09:11 +0900