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Deposition and mechanism study for super-high dielectric constant AlOx/TiOy nanolaminates
6th International Conference on MATERIALS SCIENCE & NANOTECHNOLOGY. September 06, 2023-September 07, 2023. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2023-09-15 03:20:38 +0900 Updated at: 2024-01-09 03:09:11 +0900