HOME > Published patent applications > Detail[Published patent application] 半導体基板、半導体基板の製造方法およびそれを用いた半導体装置2020-07-09. 2020105038 (Google Patents) , 7191322NIMS author(s)KIMOTO, KojiMITSUISHI, KazutakaNABATAME, ToshihideIROKAWA, YoshihiroCreated at :2023-07-22 21:46:03 +0900 Updated at :2023-07-22 21:46:03 +0900
