HOME > 論文 > 書誌詳細Reaction mechanism of ZrO x metal resists with extreme ultraviolet irradiationYoshiyuki Yamashita, Toyohiro Chikyow, Julius Joseph Santillan, Toshiro Itani. Japanese Journal of Applied Physics 58 [SD] SDDC01. 2019.https://doi.org/10.7567/1347-4065/ab0542 NIMS著者山下 良之知京 豊裕Materials Data Repository (MDR)上の本文・データセット作成時刻: 2019-04-26 03:00:20 +0900 更新時刻: 2026-10-07 04:33:14 +0900
