HOME > Article > DetailReaction mechanism of ZrO x metal resists with extreme ultraviolet irradiationYoshiyuki Yamashita, Toyohiro Chikyow, Julius Joseph Santillan, Toshiro Itani. Japanese Journal of Applied Physics 58 [SD] SDDC01. 2019.https://doi.org/10.7567/1347-4065/ab0542 NIMS author(s)YAMASHITA, YoshiyukiCHIKYO, ToyohiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2019-04-26 03:00:20 +0900Updated at: 2024-04-02 01:13:29 +0900
