Observation of Atomic-Scale Structural Changes in Al<sub>2</sub>O<sub>3</sub>/GaN Interfacial Layers Prepared with a Dummy-SiO<sub>2</sub> Process | SAMURAI, NIMS Researchers Directory Service

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Observation of Atomic-Scale Structural Changes in Al₂O₃/GaN Interfacial Layers Prepared with a Dummy-SiO₂ Process

UZUHASHI, Jun, IROKAWA, Yoshihiro, NABATAME, Toshihide, OHKUBO, Tadakatsu, KOIDE, Yasuo.

ECS Journal of Solid State Science and Technology 14 [8] 085001. 2025.

https://doi.org/10.1149/2162-8777/adf3e3

Open Access The Electrochemical Society (Publisher) Materials Data Repository (MDR)

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Fulltext and dataset(s) on Materials Data Repository (MDR)

MDRavailable Observation of Atomic-Scale Structural Changes in Al<sub>2</sub>O<sub>3</sub>/GaN Interfacial Layers Prepared with a Dummy-SiO<sub>2</sub> Process

Created at: 2025-08-07 03:08:18 +0900 Updated at: 2026-09-21 04:30:11 +0900

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