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Effects of low temperature buffer layer on all-sputtered epitaxial GaN/AlN film on Si (111) substrate

著者Takahiro Nagata, Yuya Suemoto, Yoshihiro Ueoka, Masami Mesuda, Liwen Sang, Toyohiro Chikyow.
掲載誌名Japanese Journal of Applied Physics 60 [SC] SCCG03
ISSN: 13474065, 00214922
ESIでのカテゴリ: PHYSICS
出版社IOP Publishing
発表年2021
言語English
DOIhttps://doi.org/10.35848/1347-4065/abf07f
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