Takahiro Nagata; Yuya Suemoto; Yoshihiro Ueoka; Masami Mesuda; Liwen Sang; Toyohiro Chikyow

doi:10.35848/1347-4065/abf07f

Effects of low temperature buffer layer on all-sputtered epitaxial GaN/AlN film on Si (111) substrate

著者	Takahiro Nagata, Yuya Suemoto, Yoshihiro Ueoka, Masami Mesuda, Liwen Sang, Toyohiro Chikyow.
掲載誌名	Japanese Journal of Applied Physics 60 [SC] SCCG03 ISSN: 13474065, 00214922 ESIでのカテゴリ: PHYSICS
出版社	IOP Publishing
発表年	2021
言語	English
DOI	https://doi.org/10.35848/1347-4065/abf07f
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