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Effects of low temperature buffer layer on all-sputtered epitaxial GaN/AlN film on Si (111) substrate

Author(s)Takahiro Nagata, Yuya Suemoto, Yoshihiro Ueoka, Masami Mesuda, Liwen Sang, Toyohiro Chikyow.
Journal titleJapanese Journal of Applied Physics 60 [SC] SCCG03
ISSN: 13474065, 00214922
ESI category: PHYSICS
PublisherIOP Publishing
Year of publication2021
LanguageEnglish
DOIhttps://doi.org/10.35848/1347-4065/abf07f
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