HOME > Article > DetailEffects of low temperature buffer layer on all-sputtered epitaxial GaN/AlN film on Si (111) substrateTakahiro Nagata, Yuya Suemoto, Yoshihiro Ueoka, Masami Mesuda, Liwen Sang, Toyohiro Chikyow. Japanese Journal of Applied Physics 60 [SC] SCCG03. 2021.https://doi.org/10.35848/1347-4065/abf07f NIMS author(s)NAGATA, TakahiroSANG, LiwenCHIKYO, ToyohiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2021-08-06 03:00:24 +0900Updated at: 2024-04-02 02:51:49 +0900