Effects of low temperature buffer layer on all-sputtered epitaxial GaN/AlN film on Si (111) substrate | SAMURAI, NIMS Researchers Directory Service

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Effects of low temperature buffer layer on all-sputtered epitaxial GaN/AlN film on Si (111) substrate

Takahiro Nagata, Yuya Suemoto, Yoshihiro Ueoka, Masami Mesuda, Liwen Sang, Toyohiro Chikyow.

Japanese Journal of Applied Physics 60 [SC] SCCG03. 2021.

https://doi.org/10.35848/1347-4065/abf07f

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Created at: 2021-08-06 03:00:24 +0900 Updated at: 2026-10-08 04:47:48 +0900

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