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極低角度入射ビームオージェ深さ方向分析によるHfO2/Si基板の分析
(Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam)

荻原 俊弥, 長田 貴弘, 吉川 英樹.
JOURNAL OF SURFACE ANALYSIS 24 [3] 192-205. 2018.
https://doi.org/10.1384/jsa.24.192
Open Access 一般社団法人　表面分析研究会 (Publisher) Materials Data Repository (MDR)

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2018-06-05 20:55:51 +0900Updated at: 2024-10-06 05:08:14 +0900

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