HOME > 論文 > 書誌詳細Batch production of single-crystal diamond bridges and cantilevers for microelectromechanical systemsMeiyong Liao, Chun Li, Shunichi Hishita, Yasuo Koide. Journal of Micromechanics and Microengineering 20 [8] 085002. 2010.https://doi.org/10.1088/0960-1317/20/8/085002 NIMS著者廖 梅勇菱田 俊一小出 康夫Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 16:09:55 +0900更新時刻: 2024-04-02 06:07:04 +0900
