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Batch production of single-crystal diamond bridges and cantilevers for microelectromechanical systems

Meiyong Liao, Chun Li, Shunichi Hishita, Yasuo Koide.
Journal of Micromechanics and Microengineering 20 [8] 085002. 2010.
https://doi.org/10.1088/0960-1317/20/8/085002

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