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Direct feature extraction from two-dimensional X-ray diffraction images of semiconductor thin films for fabrication analysis

著者Akihiro Yamashita, Takahiro Nagata, Shinjiro Yagyu, Toru Asahi, Toyohiro Chikyow.
掲載誌名Science and Technology of Advanced Materials: Methods 2 [1] 23-37
ISSN: 27660400
出版社Informa UK Limited
発表年2022
言語English
DOIhttps://doi.org/10.1080/27660400.2022.2029222
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