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Direct feature extraction from two-dimensional X-ray diffraction images of semiconductor thin films for fabrication analysis

Akihiro Yamashita, Takahiro Nagata, Shinjiro Yagyu, Toru Asahi, Toyohiro Chikyow.

Science and Technology of Advanced Materials: Methods 2 [1] 23-37. 2022.

https://doi.org/10.1080/27660400.2022.2029222

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2022-04-23 03:26:00 +0900Updated at: 2024-04-02 05:15:36 +0900

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