Demonstration of β-Ga <sub>2</sub> O <sub>3</sub> MEMS resonators fabricated by crystallographic gas etching of (001) β-Ga <sub>2</sub> O <sub>3</sub> substrates | SAMURAI, NIMS Researchers Directory Service

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Demonstration of β-Ga ₂ O ₃ MEMS resonators fabricated by crystallographic gas etching of (001) β-Ga ₂ O ₃ substrates

Takayoshi Oshima, Yuichi Oshima, Yuto Amano, Masataka Imura, Meiyong Liao, Ya Zhang.

Applied Physics Express 19 [11] 116501-1-116501-5. 2026.

https://doi.org/10.35848/1882-0786/aebde4

Open Access IOP Publishing (Publisher) Materials Data Repository (MDR)

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

MDRavailable Demonstration of β-Ga <sub>2</sub> O <sub>3</sub> MEMS resonators fabricated by crystallographic gas etching of (001) β-Ga <sub>2</sub> O <sub>3</sub> substrates

Created at: 2026-11-13 03:07:06 +0900 Updated at: 2026-11-13 03:07:06 +0900

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