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Thermal mismatch induced stress characterization by dynamic resonance based on diamond MEMS

Huanying Sun, Xiulin Shen, Liwen Sang, Masataka Imura, Yasuo Koide, Jianqiang You, Tie-Fu Li, Satoshi Koizumi, Meiyong Liao.
Applied Physics Express 14 [4] 045501. 2021.

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    作成時刻: 2021-03-12 03:00:17 +0900更新時刻: 2024-04-02 04:48:26 +0900

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