HOME > 論文 > 書誌詳細Thermal mismatch induced stress characterization by dynamic resonance based on diamond MEMSHuanying Sun, Xiulin Shen, Liwen Sang, Masataka Imura, Yasuo Koide, Jianqiang You, Tie-Fu Li, Satoshi Koizumi, Meiyong Liao. Applied Physics Express 14 [4] 045501. 2021.https://doi.org/10.35848/1882-0786/abe7b0 NIMS著者井村 将隆小出 康夫小泉 聡廖 梅勇Materials Data Repository (MDR)上の本文・データセット作成時刻: 2021-03-12 03:00:17 +0900更新時刻: 2024-09-12 06:43:28 +0900