Crystal growth of a MnS buffer layer for non-polar AlN on Si (100) deposited by radio frequency magnetron sputtering | SAMURAI, NIMS Researchers Directory Service

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Crystal growth of a MnS buffer layer for non-polar AlN on Si (100) deposited by radio frequency magnetron sputtering

Kota Tatejima, Takahiro Nagata, Keiji Ishibashi, Kenichiro Takahashi, Setsu Suzuki, Atsushi Ogura, Toyohiro Chikyow.

Japanese Journal of Applied Physics 58 [SB] SBBK03. 2019.

https://doi.org/10.7567/1347-4065/aafd8e

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Created at: 2019-08-24 03:00:16 +0900Updated at: 2024-04-02 01:50:17 +0900

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