HOME > 論文 > 書誌詳細Crystal growth of a MnS buffer layer for non-polar AlN on Si (100) deposited by radio frequency magnetron sputteringKota Tatejima, Takahiro Nagata, Keiji Ishibashi, Kenichiro Takahashi, Setsu Suzuki, Atsushi Ogura, Toyohiro Chikyow. Japanese Journal of Applied Physics 58 [SB] SBBK03. 2019.https://doi.org/10.7567/1347-4065/aafd8e NIMS著者立島 滉大長田 貴弘知京 豊裕Materials Data Repository (MDR)上の本文・データセット作成時刻 :2019-08-24 03:00:16 +0900 更新時刻 :2020-11-16 22:14:47 +0900