- ZHANG.Han@nims.go.jp
- Address
- 305-0047 1-2-1 Sengen Tsukuba Ibaraki JAPAN [Access]
Research
PublicationsNIMS affiliated publications since 2004.
Research papers
- Hongxin Wang, Han Zhang, Ryo Tamura, Bo Da, Shimaa A. Abdellatef, Ikumu Watanabe, Nobuyuki Ishida, Daisuke Fujita, Nobutaka Hanagata, Tomoki Nakagawa, Jun Nakanishi. Mapping stress inside living cells by atomic force microscopy in response to environmental stimuli. Science and Technology of Advanced Materials. 24 [1] (2023) 2265434 10.1080/14686996.2023.2265434 Open Access
- Bo Da, Long Cheng, Xun Liu, Kunji Shigeto, Kazuhito Tsukagoshi, Toshihide Nabatame, Zejun Ding, Yang Sun, Jin Hu, Jiangwei Liu, Daiming Tang, Han Zhang, Zhaoshun Gao, Hongxuan Guo, Hideki Yoshikawa, Shigeo Tanuma. Cylindrically symmetric rotating crystals observed in crystallization process of InSiO film. Science and Technology of Advanced Materials: Methods. 3 [1] (2023) 2230870 10.1080/27660400.2023.2230870 Open Access
- Ovidiu Cretu, Han Zhang, Koji Kimoto. Direct Observation of Thermal Vibration Modes Using Frequency-Selective Electron Microscopy. Nano Letters. 22 [24] (2022) 10034-10039 10.1021/acs.nanolett.2c03762
Proceedings
- CHENG, Qian, MA, Jun, ZHANG, Han, SHINYA, Norio, Luchang Qin, TANG, Jie. Electrodeposition of MnO2 on Carbon Nanotube Thin Film . TRANSACTIONS OF THE MATERIALS RESEARCH SOCIETY OF JAPAN. (2010) 369-372
- ZHANG, Han, TANG, Jie, Pinwen, ZHU, Otto Zhou, Lu-Chang Qin. Fabrication of LaB6 single nanowire field emitters and their in-situ TEM field emission measurements. Trans of MRS-J. (2007) 747-750
- ZHANG, Han, TANG, Jie, Qi Zhang, Lu-Chang Qin. LaB6 Single-Crystalline Nanowires for Use as a Field-Emission Point Electron Source. Proceedings of IMC16. (2006) 1254
Presentations
- OH, Koukin, ZHANG, Han, NAKANISHI, Jun. AFM Based Intracellular Prestress Characterization for Living cells in Response to Environmental Stimuli. ナノ科学シンポジウム2023. 2023
- ZHANG, Han. Commercialization of LaB6 nanowire emitter. 電子光学設計技術分科会第10回研究会. 2023 Invited
- KIMOTO, Koji, CRETU, Ovidiu, KIKKAWA, Jun, ZHANG, Han, HARANO, Koji, UESUGI, Fumihiko, MATSUNAMI, Shigeyuki. STEM and EELS for Data-Driven Material Research. The International Workshop on Advanced and In Situ Microscopies of Functional Nanomaterials and Devices (IAMNano). 2023 Invited
Misc
- 室町 英治, 藤田 高弘, 藤田 大介, 村川 健作, 山内 泰, 三石 和貴, 川喜多 磨美子, 岩井 秀夫, 大久保 忠勝, 川喜多 仁, 北澤 英明, 木本 浩司, クスタンセ オスカル, 倉橋 光紀, 後藤 敦, 坂口 勲, 坂田 修身, 櫻井 健次, 張 晗, 篠原 正, 清水 禎, 清水 智子, 志波 光晴, 鈴木 拓, 関口 隆史, 丹所 正孝, 知京 豊裕, 長田 貴弘, 野口 秀典, 端 健二郎, 宝野 和博, 柳生 進二郎, 山下 良之, 吉川 元起, 吉川 英樹, 吉武 道子, 渡邉 賢, 渡邊 誠. 材料イノベーションを加速する先進計測テクノロジーの現状と動向 物質・材料研究のための先進計測テクノロジー. 調査分析室レポートNIMS-RAO-FY2016-3 [ISBN] 978-4-9900563-7-7. 1 (2016) 42-51
- 室町 英治, 藤田 高弘, 藤田 大介, 村川 健作, 山内 泰, 三石 和貴, 川喜多 磨美子, 岩井 秀夫, 大久保 忠勝, 川喜多 仁, 北澤 英明, 木本 浩司, クスタンセ オスカル, 倉橋 光紀, 後藤 敦, 坂口 勲, 坂田 修身, 櫻井 健次, 張 晗, 篠原 正, 清水 禎, 清水 智子, 志波 光晴, 鈴木 拓, 関口 隆史, 丹所 正孝, 知京 豊裕, 長田 貴弘, 野口 秀典, 端 健二郎, 宝野 和博, 柳生 進二郎, 山下 良之, 吉川 元起, 吉川 英樹, 渡邉 賢, 渡邊 誠. 材料イノベーションを加速する先進計測テクノロジーの現状と動向. 調査分析室レポート. (2016) 73-89
Published patent applications
- エミッタ、それを用いた電子銃および電子機器 (2021)
- 走査型電子顕微鏡用電子銃チャンバー、これを含む電子銃及び走査電子顕微鏡 (2021)
- 面エミッタの製造方法、点エミッタの製造方法及び構造体 (2008)
Center for Basic Research on Materials
LaB6 ナノワイヤ冷電界放出による新世代電子顕微鏡
LaB6，ナノテクノロジー，電子源，冷電界放出，電子顕微鏡，SEM，TEM，半導体検測
Overview
Cold field emission (CFE) produces the brightest and the most monochromatic electron beam. Such electron beam is highly demanded in applicationof electron microscopy for use in material research, pharmaceutic discovery and semiconductor manufacturing. For a long time, wide application ofCFE was hindered because it suffers from emission instability in conventional vacuum condition. We produced nanowires of LaB6 material one outof 100 billion size of a conventional electron emitter. The combination of low work function and nanometric size produced an emission brightness100 times higher and stability 10 times better than conventional electron sources. Wide application of LaB6 nanowire CFE has been realized fromcompact tabletop SEMs to atomic-resolution aberration-corrected TEMs.
Novelty and originality
1. LaB6 nanowires are synthesized as single crystalline without defects or inpurity;
2. We developed nano-manipulation method to assemble single-nanowire emitter with high speed and high quality;
3. LaB6 nanowire emitter produced electron beam with energy spread of 0.2eV;
4. Brightness is 100 times higher than state-of-the art Tungsten single crystal cold field emitter;
5. No emission decay and probe current noise lower than 1% under vacuum of 1E-7Pa, which is 1000 times higher than that required by Tungsten CFE;
6. Extraction voltage of ~200V is enough to generate high density electron emission. (Tungsten: ~3000V)
Details
We first used a chemical vapor deposition method to synthesize large quantity of LaB6 nanowires on a catalyzed substrate. (A) A single nanowire was picked up and assembled into a nanowire electron emitter using nano-manipulation method (B) A speical field evaporation method was used to form a clean and La atom terminated surface on the nanowire tip to enable stable high brightness electron emission. (C) Such an emitter was then installed into commercial electron microscopes to improve both energy and spatial resolution. (D) Using the nanowire emitter, we showed 0.2eV energy spread shown in the zero-loss peak of EELS and single atom resolution in STEM. (E)
Summary
Recently, material research and semiconductor manufacturing both approached precision of 1nm. As the eye of industry, electron microscopy withhigh resolution is increasingly demanded. The high brightness, monochromaticity and endurance of the LaB6 nanowire emitter not only enhancesresolution of the current electron microscope tools, but also lead to invention of new generation electron microscopes of more compact design, lowerequipment cost and faster analysis speed.
