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ITAKURA, Akiko
Address
305-0047 1-2-1 Sengen Tsukuba Ibaraki JAPAN [Access]
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Research

Keywords

Surface stress, Thin film, Sensing,

PublicationsNIMS affiliated publications since 2004.

Research papers
Books
Proceedings
Presentations
Patents
  • No. 4930940 薄膜のヤング率相当の機械特性の測定方法とそれに用いる装置 (2012)
  • No. 3950951 欠陥表面応力の緩和方法 (2007)
  • No. 3572358 表面欠陥検出方法およびその装置 (2004)

Society memberships

日本表面科学会、日本真空学会、日本物理学会

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