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Role of Oxygen in Hf-based High-k Gate Stacks on Vfb Shifts
(Hf-酸化物ゲートスタックのVfbシフトへ及ぼす酸素の役割)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-27 01:54:37 +0900Updated at: 2024-05-02 09:08:36 +0900