HOME > Proceedings > DetailLow Temperature Growth of GaN film by Near-Atmospheric Plasma-Assisted Chemical Vapor DepositionNAGATA, Takahiro, SAKUMA, Yoshiki, ANZAI Jyunichiro, KUNUGI Syunsuke, UEHARA Tsuyoshi, CHIKYOW, Toyohiro. TRANSACTIONS OF THE MATERIALS RESEARCH SOCIETY OF JAPAN 489-492. 2007.NIMS author(s)NAGATA, TakahiroSAKUMA, YoshikiCHIKYO, ToyohiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-27 01:10:26 +0900Updated at: 2017-03-17 03:09:58 +0900