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ITO電極の酸素がHfO2 MOSキャパシタのフラットバンド電圧へ及ぼす影響
(The effect of oxygen in ITO electrode on flat band voltage of HfO2 MOS capacitors)
日本金属学会2011年秋期（第149回）大会. November 07, 2011-November 09, 2011.
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Created at: 2017-02-14 11:00:48 +0900Updated at: 2017-07-10 21:07:44 +0900