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HVPE法によるα型酸化ガリウムの成長
(Halide vapor phase epitaxy of alpha-Ga2O3)
The International Workshop on Gallium Oxide and Related Material. 2015.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:12:42 +0900Updated at: 2017-07-10 22:10:32 +0900