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HVPE法によるα型酸化ガリウムの成長
(Halide vapor phase epitaxy of alpha-Ga2O3)

Author(s)OSHIMA, Yuichi, VILLORA, Garcia, SHIMAMURA, Kiyoshi.
Event nameThe International Workshop on Gallium Oxide and Related Material
Year of publication2015
LanguageJapanese

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