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Investigation of HfSiOx gate insulator formed by changing fabrication process conditions for GaN power device

生田目 俊秀, 前田 瑛里香, 井上 万里, 廣瀨 雅史, Ryota Ochi, 色川 芳宏, Tamotsu Hashizume, Koji Shiozaki, 小出 康夫.
AWAD2021. 2021. Invited

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2021-09-18 03:00:22 +0900Updated at: 2024-03-05 12:21:42 +0900

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