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準安定原子露光下の極薄レジストからのイオン放出
(Ion emission from ultrathin resists during exposure to metastable atom beams)
American Vauum Society(AVS) 49th International Symposium. November 04, 2002-November 08, 2002.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 02:49:28 +0900 Updated at: 2017-07-10 18:30:37 +0900