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Nanoparticle Formation and Microstructural Changes in Silicon Thermal Oxide Induced by High-flux Negative Copper Implantation
(大電流負Cuイオン注入によるシリコン熱酸化膜中のナノ粒子形成とミクロ構造変化)
12th International Conference on Ion Beam Modification of Materi. September 03, 2000-September 08, 2000.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 02:03:47 +0900 Updated at: 2023-04-09 15:16:55 +0900