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AuthorKeitaro Suzuki, Shigeki Yokono, Jun Kaminaga, FUKATA, Naoki, SEKIGUCHI, Takashi, HISHITA, Shunichi, Kouichi Kaminaga.
TitleSi+イオン注入によるSiナノワイヤ中へのSiナノ結晶形成・制御
(Formation of Si nanocrystals in Si nanowires by Si+ Ion implantation)
Event name秋季第72回応用物理学会学術講演会
Year of publication2012
LanguageJapanese
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