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Si+イオン注入によるSiナノワイヤ中へのSiナノ結晶形成・制御
(Formation of Si nanocrystals in Si nanowires by Si+ Ion implantation)
秋季第72回応用物理学会学術講演会. 2012.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:53:05 +0900Updated at: 2017-07-10 21:28:41 +0900