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イオン注入熱酸化法による酸化物ナノ粒子の形成
(Formation of oxide-nanoparticles by ion implantation combined with thermal oxidation)
第16回日本MRS学術シンポジウム. December 10, 2005-December 11, 2005.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:09:24 +0900Updated at: 2017-07-10 19:27:09 +0900