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ALD法で作製したTa-Nb-O-N絶縁膜の電気特性
(The electrical properties of Ta-Nb-O-N gate insulator fabricated by ALD)
日本金属学会2013年度春期講演大会. 2013.
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Created at: 2017-02-14 11:21:57 +0900Updated at: 2017-07-10 21:31:56 +0900