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AuthorYOSHIKAWA, Hideki, JIN, Hua, TANAKA, Hajime, SHINOTSUKA, Hiroshi, IWAI, Hideo, ARAI, Masao, TANUMA, Shigeo.
Title反射電子エネルギー損失分光スペクトル解析への因子分析の応用 -Si, SiO2, GaAsのエネルギー損失関数の導出
(Application of factor analysis to REELS - Evaluation of energy loss functions of Si, SiO2, and GaAs)
Event name第30回表面科学学術講演会・第51回真空に関する連合講演会
Year of publication2010
LanguageJapanese
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