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熱酸化過程でのSiナノワイヤ中のPおよびBの偏析挙動
(Segregation behaviors of P and B in Si nanowires during thermal oxidation)
2008年秋季 第69回応用物理学会学術講演会. 2008.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:29:00 +0900Updated at: 2018-06-05 12:18:14 +0900