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過剰酸素の抑制による真空環境で安定なIn-Si-O TFT
(Suppression of excess oxygen for environmentally stable amorphous In-Si-O thin-film transistors)
第76回応用物理学会秋季学術講演会. September 13, 2015-September 16, 2015.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:12:39 +0900 Updated at: 2017-07-10 22:11:16 +0900