HOME > 口頭発表 > 書誌詳細Improvement of phosphorus doping efficiency by exhaust gas flow modifications of microwave CVD systemSHIMAOKA, Takehiro, KOIZUMI, Satoshi, ICHIKAWA, Kimiyoshi. JSPS-CNRS diamond detector WS 2019. 2019.NIMS著者小泉 聡市川 公善Materials Data Repository (MDR)上の本文・データセット作成時刻: 2020-01-18 03:00:24 +0900更新時刻: 2020-01-18 03:00:24 +0900