HOME > Presentation > DetailImprovement of phosphorus doping efficiency by exhaust gas flow modifications of microwave CVD systemSHIMAOKA, Takehiro, KOIZUMI, Satoshi, ICHIKAWA, Kimiyoshi. JSPS-CNRS diamond detector WS 2019. October 29, 2019-November 01, 2019.NIMS author(s)KOIZUMI, SatoshiICHIKAWA, KimiyoshiFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2020-01-18 03:00:24 +0900Updated at: 2020-01-18 03:00:24 +0900