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Scalable growth of atomically-thin MoS2 layers in conventional MOCVD system using molybdenum oxychloride as the molybdenum source
ICCGE-20. July 30, 2023-August 04, 2023.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2023-09-06 04:00:05 +0900 Updated at: 2023-09-06 04:00:05 +0900