- 退職
- 2023年10月退職
研究内容
- Keywords
nanomaterials; nanoelectronics; carbon nanotube; 2D materials; chemical vapor deposition; transistors
出版物2004年以降のNIMS所属における研究成果や出版物を表示しています。
論文
- Changshuai Ding, Hanyu Jia, Qingqing Sun, Zhiqiang Yao, Huige Yang, Wentao Liu, Xinchang Pang, Shisheng Li, Chuan Liu, Takeo Minari, Jinzhou Chen, Xuying Liu, Yanlin Song. Wafer-scale single crystals: crystal growth mechanisms, fabrication methods, and functional applications. Journal of Materials Chemistry C. (2021) 10.1039/d1tc01101d
- Shisheng Li, Jinhua Hong, Bo Gao, Yung‐Chang Lin, Hong En Lim, Xueyi Lu, Jing Wu, Song Liu, Yoshitaka Tateyama, Yoshiki Sakuma, Kazuhito Tsukagoshi, Kazu Suenaga, Takaaki Taniguchi. Tunable Doping of Rhenium and Vanadium into Transition Metal Dichalcogenides for Two‐Dimensional Electronics. Advanced Science. (2021) 2004438 10.1002/advs.202004438 Open Access
- Monika R. Snowdon, Ekaterina V. Sukhanova, Zakhar I. Popov, Shisheng Li, Leanddas Nurdiwijayanto, Takaaki Taniguchi, Shinsuke Ishihara, Takeshi Tanaka, Hiromichi Kataura, Kazuhito Tsukagoshi, Robert L. F. Liang, Marina Freire-Gormaly, Derek J. Schipper, Dmitry G. Kvashnin, Dai-Ming Tang. Iptycene-Assisted Alignment of Chirality-Sorted SWCNTs for Field-Effect Transistors. ACS Applied Nano Materials. 8 [2] (2025) 944-951 10.1021/acsanm.4c04305
会議録
- Min-Wen Yu, Satoshi Ishii, Shisheng Li, Ji-Ren Ku, Jhen-Hong Yang, Kuan-Lin Su, Takaaki Taniguchi, Tadaaki Nagao, Kuo-Ping Chen. Strong coupling in a ID plasmonic-exciton hybrid systems. Conference on Lasers and Electro-Optics OSA Technical Digest (Optical Society of America, 2020). (2020) 10.1364/cleo_at.2020.jtu2d.8
口頭発表
- 佐久間 芳樹, 楊 旭, 小野 佑樹, 李 世勝, 廣戸 孝信, 奈良 純, 池沢 道男, 松本 貴士. MOCVD法によるウエハスケール単層MoS2の高配向エピタキシャル成長. 第84回応用物理学会秋季学術講演会. 2023
- YANG, Xu, LI, Shisheng, OHTAKE, Akihiro, SAKUMA, Yoshiki. Scalable growth of atomically-thin MoS2 layers in conventional MOCVD system using molybdenum oxychloride as the molybdenum source. ICCGE-20. 2023
- LI, Shisheng. Wafer-Scale Growth of 2D Transition Metal Dichalcogenides. MANA Symposium 2022. 2022
所属学会
日本化学会, 応用物理学会
受賞履歴
- Excellent Poster Presentation Award of MANA INTERNATIONAL SYMPOSIUM jointly with ICYS (2019)
- 日本化学会 第99春季年会 優秀講演賞(学術) (2019)
外部資金獲得履歴
- 日本学術振興会(JSPS) 基盤研究(C) (2021)
- 日本学術振興会(JSPS) 若手研究 (2019)
ナノアーキテクトニクス材料研究センター
Wafer-scale 2D semiconductors for flexible inkjet-printed electronics
Two-Dimensional Semiconductors, Chemical Vapor Deposition, Integration, Transistors
概要
The advancement of smart society heavily depends on the use of flexible and wearable electronic devices. Among various semiconductor materials, two-dimensional (2D) semiconductors such as transition metal dichalcogenides (TMDs) (MX2, M=Mo, W; X=S, Se, Te) offer great promise. These TMDs possess atomic thinness, mechanical flexibility, durability, excellent electrical and optical properties, as well as chemical stability, making them superior to rigid 3D semiconductors. Consequently, it is crucial to develop innovative techniques for growing 2D TMD films and integrating them into flexible devices. To address this need, we have successfully developed a straightforward and replicable chemical vapor deposition (CVD) method for synthesizing 2D TMDs with large dimensions and exceptional electrical and optical qualities.
新規性・独創性
• Wafer-scale and patterned 2D TMDs are grown using an innovative CVD technique that utilizes molten salts as precursors.
• Effective n-type and p-type doping of 2D TMDs is accomplished by employing mixed molten-salt precursors.
• High-efficiency and cost-effective integration of 2D TMD-based thin-film transistors (TFTs) with inkjet printing technique.
内容
Schematic illustration of the deposition of molten salt, Na2MoO4 for CVD growth of wafer-scale and patterned MoS2 film. In general, 2D TMDs (MX2, M=Mo, W; X=S, Se, Te) can be grown with molten salts, e.g., Na2MoO4, Na2WO4, NaReO4 and NaVO3.
The photographs showcase a 2-inch wafer-scale MoS2 film, inkjet-printed TFTs on sapphire substrates, and flexible MoS2-based TFTs on a polyimide film. Further endeavors will be dedicated to the exploration of 2D TMD-based electronic devices, aimed at sensing and detecting various physical and chemical signals. These efforts will play a crucial role in advancing the development of 2D TMD-based flexible and wearable devices.
まとめ
Molten-salt CVD technique is employed to synthesize wafer-scale and patterned 2D TMDs. These remarkable materials exhibit excellent mobility and display a high current on/off ratio when utilized as channel components in TFTs. In the future, considerable focus will be directed towards integrating 2D TMDs into flexible and wearable sensors and detectors using the inkjet printing technique.
