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膜型表面応力センサを用いた水素ガス検出
(Detection of hydrogen using Membrane-Type Surface Stress Sensor (MSS))
2017年真空・表面科学合同講演会. 2017.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-09-01 22:39:02 +0900Updated at: 2018-06-05 14:12:21 +0900