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AuthorFUKATA, Naoki, Satoshi Matsushita, Masanori Seoka, CHEN, Jun, SEKIGUCHI, Takashi, kouichi Murakami.
TitleSiナノワイヤ中に単独ドープしたPおよびBの熱酸化過程での偏析挙動
(Segregation of P and B in Si nanowires during thermal oxidation)
Event name春季第55回応用物理学会学術講演会
Year of publication2008
LanguageJapanese
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