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メタル/High-kトランジスタにおけるゲート絶縁膜としてのALD-TiO2膜
(ALD-TiO2 as gate insulator for Metal/High-k transistor)
NIMS Conference 2013. July 01, 2013-July 03, 2013. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 03:33:01 +0900Updated at: 2024-03-05 11:44:33 +0900