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(TaC)1-xAlx/HfO2 MOSキャパシタでVfbシフトへ及ぼすAl原子の役割
(Role of Al atoms in (TaC)1-xAlx on Vfb shift for HfO2 MOS capacitor)
The Eighth International Nanotechnology Conference on Communicat. May 08, 2012-May 11, 2012.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:21:55 +0900 Updated at: 2017-07-10 21:20:33 +0900