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スパッタ法で作製した(Al,Sc)N薄膜中の不純物酸素の検討
(Study on oxygen impurity in (Al,Sc)N thin films fabricated by sputtering technique)
2022年 第83回応用物理学会秋季学術講演会. September 20, 2022-September 23, 2022.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2023-01-05 12:15:42 +0900 Updated at: 2023-01-05 12:15:42 +0900