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Siナノワイヤ中にドープしたPおよびBの熱酸化過程での偏析挙動
(Segregation of P and B in Si nanowires during thermal oxidation)
春季第56回応用物理学会学術講演会. March 30, 2009-April 01, 2009.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 10:57:01 +0900 Updated at: 2017-07-10 20:28:56 +0900