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Crystallization of n-type Si0.1Ge0.9 thin films by high-speed CW laser annealing
(高速 CW レーザアニル によ る n型 Si0.1Ge0.9薄膜の結晶成長)
第84回応用物理学会秋季学術講演会. September 19, 2023-September 23, 2023.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2024-01-09 03:11:16 +0900 Updated at: 2024-01-09 03:11:16 +0900