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原子層堆積法の成長条件がAl2O3膜の特性へ及ぼす影響
(Influence of growth condition of atomic layer deposition on characteristics of Al2O3 films)
2018春期（第162回）日本金属学会講演大会. March 19, 2018-March 21, 2018.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2018-01-18 22:01:42 +0900 Updated at: 2018-06-05 14:17:16 +0900