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金属イオン注入熱酸化法によるSiO2中での酸化物ナノ粒子の形成過程
(Formation Processes of Oxide Nanoparticles in SiO2 by Metal Ion Implantation and Thermal Oxidation)
International Conference on Atomic Collisions in Solids. 2004.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 10:58:02 +0900Updated at: 2017-07-10 19:00:17 +0900