Effects of ZnxMn1-xS buffer layer on nonpolar AlN growth on Si (100) substrate

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MORITA, Masaya, 石橋啓次, 高橋健一郎, CHIKYO, Toyohiro, 小椋厚志, NAGATA, Takahiro.

33rd International Microprocesses and Nanotechnology Conference (MNC 2020). 2020-11-09-2020-11-12.

作成時刻: 2023-04-10 17:34:45 +0900更新時刻: 2023-04-10 17:34:45 +0900