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Effects of ZnxMn1-xS buffer layer on nonpolar AlN growth on Si (100) substrate

森田 雅也, 石橋 啓次, 高橋 健一郎, CHIKYO, Toyohiro, 小椋厚志, NAGATA, Takahiro.
33rd International Microprocesses and Nanotechnology Conference (MNC 2020). November 09, 2020-November 12, 2020.

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    Created at: 2023-04-10 17:34:45 +0900 Updated at: 2023-04-10 17:34:45 +0900

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